Comparison of process-prepared silicon nanopillars and metal-assisted chemical etching

Nanopillars fabricated by the metal-assisted chemical etching (MacEtch) wet etching process were compared with nanopillars fabricated by the Bosch dry etching process. The Bosch process in this study provides vertical nanopillars with smooth sidewalls, which is superior to typical Bosch processes. However, the verticality of the nanopillars depends on where Read more…